HVB112 Series 424 Solenoid valve for high vacuum HVB112 Series NC (normally closed) type Port size: NPT1/8 HVB112-6N-* HVB112-8R-* (custom order) Specifications Note 1: The durability may drop remarkably depending on the degree of dryness. Note 2: Pressurizing from the A port with the B port released to atmosphere is possible. NPT1/8 1/4 inch VCR female 0.15 0.24 B Voltage How to order HVB 6N AC100V112 5 Note: The older model HVB11-6N-5 is equivalent to the HVB112-6N-5. A Port size Model no. 6N 8R NPT1/8 1/4" JCR female joint (custom order) Port sizeA Symbol Descriptions 100 VAC 200 VAC 24 VDC…
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76 Read the precautions on pages 7 to 12 in the introduction before use. Orifice: MMD302: Ø6.3 to Ø10 MMD402: Ø14.7 to Ø16 MMD502: Ø20 MMD34502 Series Chemical liquid manual valve Subject to Export Trade Control Ordinances *Target: MMD402 and 502 only Specifications Working fluid Fluid temperature Withstanding pressure Working pressure range (A -> B) Working pressure range (B -> A) Valve seat leakage Back pressure Ambient temperature Installation attitude Orifice Cv value Chemical liquids, pure water (Note 1) 5 to 90 (Note 2, 3) 1.2 0 to 0.4 0 to 0.4 0 (at, water pressure) 0 to 0.4 0 to 60…
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76 Read the precautions on pages 7 to 12 in the introduction before use. Orifice: MMD302: Ø6.3 to Ø10 MMD402: Ø14.7 to Ø16 MMD502: Ø20 MMD34502 Series Chemical liquid manual valve Subject to Export Trade Control Ordinances *Target: MMD402 and 502 only Specifications Working fluid Fluid temperature Withstanding pressure Working pressure range (A -> B) Working pressure range (B -> A) Valve seat leakage Back pressure Ambient temperature Installation attitude Orifice Cv value Chemical liquids, pure water (Note 1) 5 to 90 (Note 2, 3) 1.2 0 to 0.4 0 to 0.4 0 (at, water pressure) 0 to 0.4 0 to 60…
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428 HVB 1 Series 5 6 7 8 Solenoid valve for high vacuum HVB 1 Series NC (normally closed) type Port size: Flange 48, 52 5 6 7 8 Specifications 14.3 B 80 19 B 80 28 H 130 AC:32.5 DC:40 H 130 Note 1: The durability may drop remarkably depending on the degree of dryness. Note 2: Pressurizing from the A port with the B port released to atmosphere is possible. (Note that the reverse vacuum is not available for HVB51-12F-5 and HVB71-15F-5.) 1.3 x 10-6 to 1 x 105 0.1 0.02 15 4.3 4.7 1.3 x 10-6 to 3 x 105 0.3 0.1 8 1.8 2.1 1.3 x 10-6 to 1 x 105 0.1 0.02 12 2.7 3.2 1.3 x 10-6 to 2 x 105 0.2 0.1 8 1.8…
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26 •Continuous use possible up to 80 • Zero particle generation realized with optimum seal structure and improved surface roughness •Valve dead space minimized •Electropolished finish specifications •Handle shape ensures optimum inner sealing •Panel installation possible •Stopper prevents diaphragm d a m a g e f r o m e x c e s s i v e tightening •JXR joint connection *1 Standard (male and female) and double barbed joints •High corrosion resistant Ni-Co alloy diaphragm *1: The JXR joint can be connected to the VCR joint. No. Parts name Materials for wetted areas Material Ni-Co alloy PCTFE…
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26 •Continuous use possible up to 80 • Zero particle generation realized with optimum seal structure and improved surface roughness •Valve dead space minimized •Electropolished finish specifications •Handle shape ensures optimum inner sealing •Panel installation possible •Stopper prevents diaphragm d a m a g e f r o m e x c e s s i v e tightening •JXR joint connection *1 Standard (male and female) and double barbed joints •High corrosion resistant Ni-Co alloy diaphragm *1: The JXR joint can be connected to the VCR joint. No. Parts name Materials for wetted areas Material Ni-Co alloy PCTFE…
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Chemical liquid manual valve/toggle valve MMD Overview This chemical liquid manual valve for semiconductor manufacturing equipment is available in 1/8 inch to 1 inch port sizes and different operations. Features The spring seal provides stable sealing. (MMD**2, GMMD**2, TMD series) Assorted fitting variations The easy-to-read indicator enables open/close status to be checked visually. No harmful polyvinyl chlorides No harmful polyvinyl chlorides generating toxic chlorine-based gases are used in actuator material. (MMD*02, GMMD*02 Series) Precautions Intro 7 2 port valve MMD*02 PFA body 76…
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Chemical liquid manual valve/toggle valve MMD Overview This chemical liquid manual valve for semiconductor manufacturing equipment is available in 1/8 inch to 1 inch port sizes and different operations. Features The spring seal provides stable sealing. (MMD**2, GMMD**2, TMD series) Assorted fitting variations The easy-to-read indicator enables open/close status to be checked visually. No harmful polyvinyl chlorides No harmful polyvinyl chlorides generating toxic chlorine-based gases are used in actuator material. (MMD*02, GMMD*02 Series) Precautions Intro 7 2 port valve MMD*02 PFA body 76…
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New Products Modular type compact regulator R2000/R2100 White Series Refer to the "Safety precautions" on the back of this catalog before starting use. CC-887A W Compressed air 1.0 1.5 5 to 60 0.05 to 0.85 1/4, 3/8 (1/2 is for an adaptor.) 0.31 Pressure gauge and nut for panel mount No Working fluid Max. working pressure MPa Withstanding pressure MPa Working temperature ˚C Setting pressure range (Note 2) MPa Reverse mechanism Port size Rc, G and NPT Product weight kg Standard accessories R2000-WModel no. How to order JIS symbol R2000 R2100 Overview Specifications R2100 (reverse regulator)…
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442 Miniature regulator RB500 Series Compact / space saving structure Port size: Push-in joint 4 and 6 dia. JIS symbol CAD DATA AVAILABLE. Symbol Descriptions Blank P L N T Blank Note 1 G39 P11 Standard Option S L S L C4 C6 Port size D ire ct io n IN OUT Standard products Panel mount Note 2 For low pressure Non-relief Without pressure gauge 21dia. 0 to 1.0MPa gauge 27 dia. 0 to 0.4MPa gauge 27 dia. 0 to 1.0MPa gauge Ozone proof specifications (custom order) Straight Elbow Straight Elbow 4 dia. 6 dia. How to order AccessoryC OptionB ConnectionA Model ConnectionA AccessoryC OptionB SSC4 P…
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