118 Manual valve for high vacuum MVB 0 Series •Formed bellows •Handle 5 6 7 Custom order Model No. Actuation Orifice MVB70 Manual ø50 Model No. Actuation Orifice MVB50 Manual ø24 MVB60 Manual ø40 •Long-life formed bellows Special, stainless steel material (ASL-350) provided. Corrosion resistance is outstanding. •Low dust generation Wetted areas (flow path) have no sliding sections that may generate particles. •Handle •Usable with back pressure The vacuum pump can be connected to either port. MVB60 MVB70MVB50 Working fluid Working pressure range Pa(abs) Maximum working differential pressure MPa…
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118 Manual valve for high vacuum MVB 0 Series •Formed bellows •Handle 5 6 7 Custom order Model No. Actuation Orifice MVB70 Manual ø50 Model No. Actuation Orifice MVB50 Manual ø24 MVB60 Manual ø40 •Long-life formed bellows Special, stainless steel material (ASL-350) provided. Corrosion resistance is outstanding. •Low dust generation Wetted areas (flow path) have no sliding sections that may generate particles. •Handle •Usable with back pressure The vacuum pump can be connected to either port. MVB60 MVB70MVB50 Working fluid Working pressure range Pa(abs) Maximum working differential pressure MPa…
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8 Rotary actuator Rack & pinion type RRC Series Size: 8, 32, 63 Oscillating angle: 90°, 180°, 270° JIS symbol Model no. Load direction Thrust load F1 Radial load F2 9.8 19.6 39.2 78.4 58.8 117.6 RRC-8 RRC-32 RRC-63 Note 1: An effective torque value is a product at working pressure 0.5MPa. Note 2: When using RRC-8 with maximum oscillating angle, working pressure to be 0.3MPa and over. Note 3: Adjustable angle is available as an option. Refer to page 13. Size Effective torque Note 1 N·m Actuation Working fluid Max. working pressure MPa Min. working pressure Note 2 MPa Withstanding pressure MPa…
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