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100 Model No. Actuation Orifice AVB512 NC ø24 AVB612 NC ø40 AVB712 NC ø50 AVB812 NC ø80 AVB21 NC ø 5 Model No. Actuation Orifice AVB522 NO ø24 AVB622 NO ø40 AVB722 NO ø50 AVB822 NO ø80 Model No. Actuation Orifice AVB532 Double acting ø24 AVB632 Double acting ø40 AVB732 Double acting ø50 AVB832 Double acting ø80 Air operated valve for high vacuum AVB *2 Series Formed bellows type 5 6 7 8 Pilot-operated solenoid valve installable Long-life formed bellows Special stainless steel material (ASL350) Durability: 1 million times (*1) *1 Life when working media is inert gas within specified range,…
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100 Model No. Actuation Orifice AVB512 NC ø24 AVB612 NC ø40 AVB712 NC ø50 AVB812 NC ø80 AVB21 NC ø 5 Model No. Actuation Orifice AVB522 NO ø24 AVB622 NO ø40 AVB722 NO ø50 AVB822 NO ø80 Model No. Actuation Orifice AVB532 Double acting ø24 AVB632 Double acting ø40 AVB732 Double acting ø50 AVB832 Double acting ø80 Air operated valve for high vacuum AVB *2 Series Formed bellows type 5 6 7 8 Pilot-operated solenoid valve installable Long-life formed bellows Special stainless steel material (ASL350) Durability: 1 million times (*1) *1 Life when working media is inert gas within specified range,…
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93 Descriptions Working fluid Working pressure range Pa(abs) Maximum working differential pressure MPa Valve seat leakage Pa·m3/s(He) External leakage Pa·m3/s(He) Withstanding pressure MPa Fluid temperature Ambient temperature Orifice mm Conductance Note 1 /s Connection Control pressure MPa Weight kg JIS symbol Specifications AVB41V AVB51V AVB61V AVB71V Note 1: The conductance is the theoretical calculation value at the molecular flow range, and is not the actual measurement value. Descriptions Applications Power voltage Load voltage/current Power consumption Internal voltage drop Light…
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113 Vacuum and inert gas 1.3 10-6 to 2.0 105 1.3 10-9 or less 1.3 10-8 or less 0.3 5 to 60 0 to 60 0.3 to 0.5 Specifications AVP21-8T AVP5 2 AVP6 2 AVP7 2 AVP8 2 1 2 3 1 2 3 1 2 3 1 2 3 1.3 10-6 to 2.5 105 0.25 1.3 10-6 to 1.5 105 1.3 10-6 to 1.0 105 1.3 10-6 to 1.0 105 1.3 10-6 to 1.0 105 5 3 1/4" tube 0.25 40 20 52 NW40 2.6 24 15 13 NW25 1.6 50 22 80 NW50 3.8 80 32 242 NW80 10.4 Descriptions Applications Power voltage Load voltage/current Power consumption Internal voltage drop Light Leakage current Lead wire length Note 4 Maximum impact Insulation resistance Withstand voltage Ambient…
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402 Centering hand BHE Series Operational stroke length: 7, 10, 14, 16, 22mm Specifications Descriptions Cylinder bore size Working fluid Max. working pressure Min. working pressure Ambient temperature Port size Operational stroke length Rod diameter Repeatability Centering precision Product weight Lubrication mm MPa MPa °C mm mm mm mm kg 20 Compressed air 0.7 0.2 5 to 60 14 10 0.01 0.05 0.260 Not required (when lubricating, use turbine oil Class 1 ISO VG32) 10 8 0.154 16 12 0.438 22 16 1.040 12 7 6 0.108 BHE-01CS BHE-03CS BHE-04CS BHE-05CS BHE-06CS 16 25 32 M3 M5 Switch specifications…
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92 Air operated valve for high vacuum AVB 1V Series Formed bellows type Aluminum body type 4 5 6 7 Model No. Actuation Orifice AVB41V NC ø16 AVB51V NC ø24 AVB61V NC ø40 AVB71V NC ø50 Precautions Always read page 9 in the introduction and the precautions on page 88 to 91 to ensure correct, safe use of this product. Working media Installation Direction when connecting piping Proximity switch, reed switch Much smaller and lighter with aluminum body Wetted areas (flow path) have no sliding sections that may generate particles. The aluminum body and dedicated actuator reduce the weight by approx.…
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115 1 ø33 ø30 ø4536 20 Side port ø6.35(1/4") ø 6. 35 (1 /4 ") 15 20 44 9 10 4 Bottom port 2 3 4 5 6 7 8 9 10 11 No. Parts name Material Cylinder Rod Ring O ring holder Grease container Valve disk B Body Pipe O ring O ring Valve disk A SUS304 C3604 SUS304 SUS304 SUS304 SUS304 SUS304 FKM FKM FKM/SUS304 1 2 3 4 5 6 7 8 9 10 11 AVP21-8T Internal structure and parts list Dimensions NC AVP21-8T NC *The cylinder switch and solenoid valve are not available for the AVP21 type. Only NC is available for actuation. AVP *2 Series Air operated valve for high vacuum 5 6 7 8 116 1 3 4 2 5 6 7 8 9 10 11 12 F G…
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48 Read the precautions on pages 7 to 12 in the introduction before use. Orifice: GAMD3*2 Ø6 to Ø10 GAMD4*2 Ø14.7 to Ø16 GAMD5*2 Ø20 No. of stations: 1 to 5 stations GAMD345*2 Series Air-operated valve for chemical liquids (manifold/branch valve) Subject to Export Trade Control Ordinances *Target: GAMD4*2 and 5*2 only Specifications Working fluid Fluid temperature Withstanding pressure Working pressure range (A —> B) Working pressure range (B —> A) Valve seat leakage Back pressure Ambient temperature Frequency Installation attitude Connection Orifice Operation section Operation pressure range…
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