HVB 12 Series 418 2 3 4 5 Common specifications Individual specifications Working fluid Withstanding pressure Fluid temperature Ambient temperature Heat proof class Allowable voltage fluctuation Atmosphere Valve structure Valve seat leakage External leakage Mounting attitude Number of endurance times Descriptions HVB*12 JIS symbol NC (normally closed) type A B HVB212 HVB312 HVB412 HVB512 1 2 2 3 3 4.5 6 4.5 6 0.04 0.17 0.17 0.33 0.33 0.6 1.05 0.6 1.05 0.6 0.15 0.5 0.25 0.4 0.2 0.05 0.2 0.15 4.3 6.5 8.3 11.8 4 6 8 (*7) 11.5 0.16 0.29 0.50 0.69 100 VAC 50/60Hz 200 VAC 50/60Hz 24 VDC 12 VDC 1.0 x…
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HVB 12 Series 418 2 3 4 5 Common specifications Individual specifications Working fluid Withstanding pressure Fluid temperature Ambient temperature Heat proof class Allowable voltage fluctuation Atmosphere Valve structure Valve seat leakage External leakage Mounting attitude Number of endurance times Descriptions HVB*12 JIS symbol NC (normally closed) type A B HVB212 HVB312 HVB412 HVB512 1 2 2 3 3 4.5 6 4.5 6 0.04 0.17 0.17 0.33 0.33 0.6 1.05 0.6 1.05 0.6 0.15 0.5 0.25 0.4 0.2 0.05 0.2 0.15 4.3 6.5 8.3 11.8 4 6 8 (*7) 11.5 0.16 0.29 0.50 0.69 100 VAC 50/60Hz 200 VAC 50/60Hz 24 VDC 12 VDC 1.0 x…
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HVB 12 Series 420 2 3 4 5 Internal structure and main parts materials Dimensions Grommet lead wire (voltage: DC type) and JXR male joint type HVB*12- -*- 2C No. Parts name Material 1 2 3 Coil assembly Core assembly tightening torque Plunger assembly (Molded coil) SUS405, SUS316L SUS405, FKM Stainless steel Stainless steel, fluoro rubber No. Parts name Material 4 5 6 O ring Spring Body FKM SUS304 SUS304 or SCS13 Fluoro rubber Stainless steel Stainless steel HVB212-4RM HVB312-4RM HVB412-4RM HVB412-6RM HVB512-4RM HVB512-6RM AModel no. 51 64 64 75 64 75 B 21 30 34 34 34 34 C 25 25 32 32 32 32 D…
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428 HVB 1 Series 5 6 7 8 Solenoid valve for high vacuum HVB 1 Series NC (normally closed) type Port size: Flange 48, 52 5 6 7 8 Specifications 14.3 B 80 19 B 80 28 H 130 AC:32.5 DC:40 H 130 Note 1: The durability may drop remarkably depending on the degree of dryness. Note 2: Pressurizing from the A port with the B port released to atmosphere is possible. (Note that the reverse vacuum is not available for HVB51-12F-5 and HVB71-15F-5.) 1.3 x 10-6 to 1 x 105 0.1 0.02 15 4.3 4.7 1.3 x 10-6 to 3 x 105 0.3 0.1 8 1.8 2.1 1.3 x 10-6 to 1 x 105 0.1 0.02 12 2.7 3.2 1.3 x 10-6 to 2 x 105 0.2 0.1 8 1.8…
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428 HVB 1 Series 5 6 7 8 Solenoid valve for high vacuum HVB 1 Series NC (normally closed) type Port size: Flange 48, 52 5 6 7 8 Specifications 14.3 B 80 19 B 80 28 H 130 AC:32.5 DC:40 H 130 Note 1: The durability may drop remarkably depending on the degree of dryness. Note 2: Pressurizing from the A port with the B port released to atmosphere is possible. (Note that the reverse vacuum is not available for HVB51-12F-5 and HVB71-15F-5.) 1.3 x 10-6 to 1 x 105 0.1 0.02 15 4.3 4.7 1.3 x 10-6 to 3 x 105 0.3 0.1 8 1.8 2.1 1.3 x 10-6 to 1 x 105 0.1 0.02 12 2.7 3.2 1.3 x 10-6 to 2 x 105 0.2 0.1 8 1.8…
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26 •Continuous use possible up to 80 • Zero particle generation realized with optimum seal structure and improved surface roughness •Valve dead space minimized •Electropolished finish specifications •Handle shape ensures optimum inner sealing •Panel installation possible •Stopper prevents diaphragm d a m a g e f r o m e x c e s s i v e tightening •JXR joint connection *1 Standard (male and female) and double barbed joints •High corrosion resistant Ni-Co alloy diaphragm *1: The JXR joint can be connected to the VCR joint. No. Parts name Materials for wetted areas Material Ni-Co alloy PCTFE…
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430 HVB 1 Series 5 6 7 8 Internal structure and main parts materials Dimensions and optional dimensions HVB51-12F-3 HVB51-12F-5 HVB61-12F-3 HVB71-15F-3 HVB71-15F-5 HVB81-15F-3 HVB81-15F-5 A B C D E F G H I J 32 33 77 100 48 52 84 89 105 110 4-M4 4-M5 40 42.4 49 54 52 55 118 139 60 70 K Note: The line diode is enclosed only with the HVB61 and HVB81 AC specifications. Thus, the terminal box cannot be assembled with this series. Note: The internal structure differs in part for the HVB*1-**F-3. Model no. Symbol Note: This can be used as the bolt hole. 1 2 3 4 5 6 7 8 9 No. Parts name Material Core…
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28 Manual valve for process gas Parts compatible with other variations OGD*0V/MGD*0V Series Custom order Body options (pages 28 to 32) •Connection•Port shape combination•Handle color Model Variations Safety specification options (page 33) •Locking mechanism•Double action mechanism OGD10V OGD20V MGD10V MGD20V How to order OGD-V, MGD-V Series options Specifications Refer to specification pages for each series. GD 1O K40V RJ MF RJ R RM W S E Port shape combination F Handle color Symbol Blank MF FM FFF FFM FMM MMM WWW ConnectionD 2 way valve 3-way separate flow valve D Connection C Port size B…
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76 Read the precautions on pages 7 to 12 in the introduction before use. Orifice: MMD302: Ø6.3 to Ø10 MMD402: Ø14.7 to Ø16 MMD502: Ø20 MMD34502 Series Chemical liquid manual valve Subject to Export Trade Control Ordinances *Target: MMD402 and 502 only Specifications Working fluid Fluid temperature Withstanding pressure Working pressure range (A -> B) Working pressure range (B -> A) Valve seat leakage Back pressure Ambient temperature Installation attitude Orifice Cv value Chemical liquids, pure water (Note 1) 5 to 90 (Note 2, 3) 1.2 0 to 0.4 0 to 0.4 0 (at, water pressure) 0 to 0.4 0 to 60…
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24 Continuous use possible up to 80 Stable inner seal performance achieved with nonrotating rod (Patent pending) Zero particle generation realized with optimum seal structure and improved surface roughness Valve dead space minimized Electropolished finish specifications Handle position and top indicator indicate whether the valve is open or closed. Panel installation possible Inner seal performance stabilized with spring High corrosion resistant Ni-Co alloy diaphragm JXR joint connection *1 Standard (male and female) and double barbed joints OGD10V OGD20V Working fluid Working pressure range…
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