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428 HVB 1 Series 5 6 7 8 Solenoid valve for high vacuum HVB 1 Series NC (normally closed) type Port size: Flange 48, 52 5 6 7 8 Specifications 14.3 B 80 19 B 80 28 H 130 AC:32.5 DC:40 H 130 Note 1: The durability may drop remarkably depending on the degree of dryness. Note 2: Pressurizing from the A port with the B port released to atmosphere is possible. (Note that the reverse vacuum is not available for HVB51-12F-5 and HVB71-15F-5.) 1.3 x 10-6 to 1 x 105 0.1 0.02 15 4.3 4.7 1.3 x 10-6 to 3 x 105 0.3 0.1 8 1.8 2.1 1.3 x 10-6 to 1 x 105 0.1 0.02 12 2.7 3.2 1.3 x 10-6 to 2 x 105 0.2 0.1 8 1.8…
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428 HVB 1 Series 5 6 7 8 Solenoid valve for high vacuum HVB 1 Series NC (normally closed) type Port size: Flange 48, 52 5 6 7 8 Specifications 14.3 B 80 19 B 80 28 H 130 AC:32.5 DC:40 H 130 Note 1: The durability may drop remarkably depending on the degree of dryness. Note 2: Pressurizing from the A port with the B port released to atmosphere is possible. (Note that the reverse vacuum is not available for HVB51-12F-5 and HVB71-15F-5.) 1.3 x 10-6 to 1 x 105 0.1 0.02 15 4.3 4.7 1.3 x 10-6 to 3 x 105 0.3 0.1 8 1.8 2.1 1.3 x 10-6 to 1 x 105 0.1 0.02 12 2.7 3.2 1.3 x 10-6 to 2 x 105 0.2 0.1 8 1.8…
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430 HVB 1 Series 5 6 7 8 Internal structure and main parts materials Dimensions and optional dimensions HVB51-12F-3 HVB51-12F-5 HVB61-12F-3 HVB71-15F-3 HVB71-15F-5 HVB81-15F-3 HVB81-15F-5 A B C D E F G H I J 32 33 77 100 48 52 84 89 105 110 4-M4 4-M5 40 42.4 49 54 52 55 118 139 60 70 K Note: The line diode is enclosed only with the HVB61 and HVB81 AC specifications. Thus, the terminal box cannot be assembled with this series. Note: The internal structure differs in part for the HVB*1-**F-3. Model no. Symbol Note: This can be used as the bolt hole. 1 2 3 4 5 6 7 8 9 No. Parts name Material Core…
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HVB 12 Series 418 2 3 4 5 Common specifications Individual specifications Working fluid Withstanding pressure Fluid temperature Ambient temperature Heat proof class Allowable voltage fluctuation Atmosphere Valve structure Valve seat leakage External leakage Mounting attitude Number of endurance times Descriptions HVB*12 JIS symbol NC (normally closed) type A B HVB212 HVB312 HVB412 HVB512 1 2 2 3 3 4.5 6 4.5 6 0.04 0.17 0.17 0.33 0.33 0.6 1.05 0.6 1.05 0.6 0.15 0.5 0.25 0.4 0.2 0.05 0.2 0.15 4.3 6.5 8.3 11.8 4 6 8 (*7) 11.5 0.16 0.29 0.50 0.69 100 VAC 50/60Hz 200 VAC 50/60Hz 24 VDC 12 VDC 1.0 x…
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26 •Continuous use possible up to 80 • Zero particle generation realized with optimum seal structure and improved surface roughness •Valve dead space minimized •Electropolished finish specifications •Handle shape ensures optimum inner sealing •Panel installation possible •Stopper prevents diaphragm d a m a g e f r o m e x c e s s i v e tightening •JXR joint connection *1 Standard (male and female) and double barbed joints •High corrosion resistant Ni-Co alloy diaphragm *1: The JXR joint can be connected to the VCR joint. No. Parts name Materials for wetted areas Material Ni-Co alloy PCTFE…
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8 Working fluid Working pressure range Pa(abs)-MPa Fluid temperature Ambient temperature Valve seat leakage Pa·m3/s(He) External leakage Pa·m3/s(He) Cv flow factor Connection Actuation Operating pressure MPa Operating pressure connection port Weight kg Inert gas/process gas 1.3 10-6 to 1.0 -10 to 80 -10 to 80 1.3 10-9 or less 2.8 10-12 or less Rc1/8 Specifications 1/4" JXR male joint 1/4" JXR female joint 1/4" double barbed joint NC (normally closed) NO (normally open) NC : 0.4 to 0.6 NO : 0.4 to 0.5 0.35 *1 High corrosion resistance and long life Ni-Co alloy diaphragm (4 million cycles…
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6 Continuous use possible up to 80 Zero particle generation realized with optimum seal structure and improved surface roughness Electropolished finish specifications Slim 30 diameter actuator High corrosion resistance and long life Ni-Co alloy diaphragm (4 million cycles achieved *2 ) JXR joint connection *1 1/4-inch size male and female fittings 22.5mm compact body *1: The JXR joint can be connected to the VCR joint. *2: Life when working fluid is inert gas within specified range, which does not contain solids such as reaction products. No. Parts name Materials for wetted areas Material Ni-Co…
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76 Read the precautions on pages 7 to 12 in the introduction before use. Orifice: MMD302: Ø6.3 to Ø10 MMD402: Ø14.7 to Ø16 MMD502: Ø20 MMD34502 Series Chemical liquid manual valve Subject to Export Trade Control Ordinances *Target: MMD402 and 502 only Specifications Working fluid Fluid temperature Withstanding pressure Working pressure range (A -> B) Working pressure range (B -> A) Valve seat leakage Back pressure Ambient temperature Installation attitude Orifice Cv value Chemical liquids, pure water (Note 1) 5 to 90 (Note 2, 3) 1.2 0 to 0.4 0 to 0.4 0 (at, water pressure) 0 to 0.4 0 to 60…
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Chemical liquid manual valve/toggle valve MMD Overview This chemical liquid manual valve for semiconductor manufacturing equipment is available in 1/8 inch to 1 inch port sizes and different operations. Features The spring seal provides stable sealing. (MMD**2, GMMD**2, TMD series) Assorted fitting variations The easy-to-read indicator enables open/close status to be checked visually. No harmful polyvinyl chlorides No harmful polyvinyl chlorides generating toxic chlorine-based gases are used in actuator material. (MMD*02, GMMD*02 Series) Precautions Intro 7 2 port valve MMD*02 PFA body 76…
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