HVB41 Series 426 Solenoid valve for high vacuum HVB41 Series NC (normally closed) type Port size: NPT1/4 (O ring sheet) JIS symbol NC (normally closed) type How to order C Voltage B Option HVB 8N AC100V41 5 3H A Connection Model no. 8N 8R NPT1/4 (with O ring seat) 1/4 VCR female joint (custom order) ConnectionA Symbol Descriptions 100 VAC 200 VAC 24 VDC 100 VAC (50/60Hz) 200 VAC (50/60Hz) 24 VDC VoltageC Blank 3H 3K B Blank Square terminal box + light G1/2 Square terminal box G1/2 Mounting plate OptionB Orifice 5 HVB41-8N-* HVB41-8R-* (custom order) Specifications Note 1: The durability may…
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HVB112 Series 424 Solenoid valve for high vacuum HVB112 Series NC (normally closed) type Port size: NPT1/8 HVB112-6N-* HVB112-8R-* (custom order) Specifications Note 1: The durability may drop remarkably depending on the degree of dryness. Note 2: Pressurizing from the A port with the B port released to atmosphere is possible. NPT1/8 1/4 inch VCR female 0.15 0.24 B Voltage How to order HVB 6N AC100V112 5 Note: The older model HVB11-6N-5 is equivalent to the HVB112-6N-5. A Port size Model no. 6N 8R NPT1/8 1/4" JCR female joint (custom order) Port sizeA Symbol Descriptions 100 VAC 200 VAC 24 VDC…
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26 •Continuous use possible up to 80 • Zero particle generation realized with optimum seal structure and improved surface roughness •Valve dead space minimized •Electropolished finish specifications •Handle shape ensures optimum inner sealing •Panel installation possible •Stopper prevents diaphragm d a m a g e f r o m e x c e s s i v e tightening •JXR joint connection *1 Standard (male and female) and double barbed joints •High corrosion resistant Ni-Co alloy diaphragm *1: The JXR joint can be connected to the VCR joint. No. Parts name Materials for wetted areas Material Ni-Co alloy PCTFE…
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26 •Continuous use possible up to 80 • Zero particle generation realized with optimum seal structure and improved surface roughness •Valve dead space minimized •Electropolished finish specifications •Handle shape ensures optimum inner sealing •Panel installation possible •Stopper prevents diaphragm d a m a g e f r o m e x c e s s i v e tightening •JXR joint connection *1 Standard (male and female) and double barbed joints •High corrosion resistant Ni-Co alloy diaphragm *1: The JXR joint can be connected to the VCR joint. No. Parts name Materials for wetted areas Material Ni-Co alloy PCTFE…
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Chemical liquid manual valve/toggle valve MMD Overview This chemical liquid manual valve for semiconductor manufacturing equipment is available in 1/8 inch to 1 inch port sizes and different operations. Features The spring seal provides stable sealing. (MMD**2, GMMD**2, TMD series) Assorted fitting variations The easy-to-read indicator enables open/close status to be checked visually. No harmful polyvinyl chlorides No harmful polyvinyl chlorides generating toxic chlorine-based gases are used in actuator material. (MMD*02, GMMD*02 Series) Precautions Intro 7 2 port valve MMD*02 PFA body 76…
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Chemical liquid manual valve/toggle valve MMD Overview This chemical liquid manual valve for semiconductor manufacturing equipment is available in 1/8 inch to 1 inch port sizes and different operations. Features The spring seal provides stable sealing. (MMD**2, GMMD**2, TMD series) Assorted fitting variations The easy-to-read indicator enables open/close status to be checked visually. No harmful polyvinyl chlorides No harmful polyvinyl chlorides generating toxic chlorine-based gases are used in actuator material. (MMD*02, GMMD*02 Series) Precautions Intro 7 2 port valve MMD*02 PFA body 76…
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76 Read the precautions on pages 7 to 12 in the introduction before use. Orifice: MMD302: Ø6.3 to Ø10 MMD402: Ø14.7 to Ø16 MMD502: Ø20 MMD34502 Series Chemical liquid manual valve Subject to Export Trade Control Ordinances *Target: MMD402 and 502 only Specifications Working fluid Fluid temperature Withstanding pressure Working pressure range (A -> B) Working pressure range (B -> A) Valve seat leakage Back pressure Ambient temperature Installation attitude Orifice Cv value Chemical liquids, pure water (Note 1) 5 to 90 (Note 2, 3) 1.2 0 to 0.4 0 to 0.4 0 (at, water pressure) 0 to 0.4 0 to 60…
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8 Rotary actuator Rack & pinion type RRC Series Size: 8, 32, 63 Oscillating angle: 90°, 180°, 270° JIS symbol Model no. Load direction Thrust load F1 Radial load F2 9.8 19.6 39.2 78.4 58.8 117.6 RRC-8 RRC-32 RRC-63 Note 1: An effective torque value is a product at working pressure 0.5MPa. Note 2: When using RRC-8 with maximum oscillating angle, working pressure to be 0.3MPa and over. Note 3: Adjustable angle is available as an option. Refer to page 13. Size Effective torque Note 1 N·m Actuation Working fluid Max. working pressure MPa Min. working pressure Note 2 MPa Withstanding pressure MPa…
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654 Block manifold compact direct operating precision regulator MNRJB500 Series Mix manifold of RJB500/RB500 Series Port size: push-in joint 4, 6, 8 JIS symbol Flow characteristic MNRJB500A-**C64 MNRJB500A-**C86 MNRJB500B-**C4 MNRJB500B-**C6 Pressure characteristic Compressed air 0.8 1.2 5 to 60 0.02 to 0.5 (0.01 to 0.2) (Note 1) 0.001 (lock sensitivity 0.004) (Note 2) 1.5 (Note 3) Push-in joint: 4, 6 Rc1/8 Push-in joint 6, 8 Push-in joint 4, 6 Specifications Descriptions Working fluid Max. working pressure Withstanding pressure Ambient temperature range Set pressure range Sensitivity Air…
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652 Compressed air 1.0 1.5 5 to 60 0.02 to 0.5 (0.01 to 0.2) (Note 1) 0.001 (lock sensitivity 0.004) (Note 2) 1.5 (Note 3) Push-in joint: 4, 6 Rc1/8 90 Specifications Descriptions Working fluid Max. working pressure Withstanding pressure Ambient temperature range Set pressure range Sensitivity Air consumption Port size Product weight Note 1: Values in parentheses are for low pressure. Note 2: Set pressure sensitivity for the pressure adjustment knob block's minimum spacing. Note 3: Value for secondary side setting pressure 0.1 MPa. IN-OUT GAUGE Mpa Mpa Mpa Mpa /min g RJB500 Flow characteristic…
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