8 Working fluid Working pressure range Pa(abs)-MPa Fluid temperature Ambient temperature Valve seat leakage Pa·m3/s(He) External leakage Pa·m3/s(He) Cv flow factor Connection Actuation Operating pressure MPa Operating pressure connection port Weight kg Inert gas/process gas 1.3 10-6 to 1.0 -10 to 80 -10 to 80 1.3 10-9 or less 2.8 10-12 or less Rc1/8 Specifications 1/4" JXR male joint 1/4" JXR female joint 1/4" double barbed joint NC (normally closed) NO (normally open) NC : 0.4 to 0.6 NO : 0.4 to 0.5 0.35 *1 High corrosion resistance and long life Ni-Co alloy diaphragm (4 million cycles…
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119 C C B B A E D 1 2 3 4 5 6 7 11 12 15 13 14 18 10 9 8 16 17 No. Parts name Material No. Parts name Material Hexagon socket set screw Handle Manual rod Adaptor Bellows assembly O ring Body assembly E snap ring Spring washer SUS304 SUS303 A2011 ASL350,SUS316 FKM SUS304 SUS304 SUS304 1 2 3 4 5 6 7 8 9 Rod Spring washer C snap ring Valve disk A O ring Rod piece Valve disk B Flat headed cross cut screw Cross headed bolt SUS316 SUS304 SUS304 SUS316 FKM SUS304 SUS316 SUS304 SUS304 10 11 12 13 14 15 16 17 18 How to order Symbol Model No. MVB50 MVB60 MVB70 Fully open 175 205 252 Fully closed 160 185…
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28 Manual valve for process gas Parts compatible with other variations OGD*0V/MGD*0V Series Custom order Body options (pages 28 to 32) •Connection•Port shape combination•Handle color Model Variations Safety specification options (page 33) •Locking mechanism•Double action mechanism OGD10V OGD20V MGD10V MGD20V How to order OGD-V, MGD-V Series options Specifications Refer to specification pages for each series. GD 1O K40V RJ MF RJ R RM W S E Port shape combination F Handle color Symbol Blank MF FM FFF FFM FMM MMM WWW ConnectionD 2 way valve 3-way separate flow valve D Connection C Port size B…
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24 Continuous use possible up to 80 Stable inner seal performance achieved with nonrotating rod (Patent pending) Zero particle generation realized with optimum seal structure and improved surface roughness Valve dead space minimized Electropolished finish specifications Handle position and top indicator indicate whether the valve is open or closed. Panel installation possible Inner seal performance stabilized with spring High corrosion resistant Ni-Co alloy diaphragm JXR joint connection *1 Standard (male and female) and double barbed joints OGD10V OGD20V Working fluid Working pressure range…
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24 Continuous use possible up to 80 Stable inner seal performance achieved with nonrotating rod (Patent pending) Zero particle generation realized with optimum seal structure and improved surface roughness Valve dead space minimized Electropolished finish specifications Handle position and top indicator indicate whether the valve is open or closed. Panel installation possible Inner seal performance stabilized with spring High corrosion resistant Ni-Co alloy diaphragm JXR joint connection *1 Standard (male and female) and double barbed joints OGD10V OGD20V Working fluid Working pressure range…
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118 Manual valve for high vacuum MVB 0 Series •Formed bellows •Handle 5 6 7 Custom order Model No. Actuation Orifice MVB70 Manual ø50 Model No. Actuation Orifice MVB50 Manual ø24 MVB60 Manual ø40 •Long-life formed bellows Special, stainless steel material (ASL-350) provided. Corrosion resistance is outstanding. •Low dust generation Wetted areas (flow path) have no sliding sections that may generate particles. •Handle •Usable with back pressure The vacuum pump can be connected to either port. MVB60 MVB70MVB50 Working fluid Working pressure range Pa(abs) Maximum working differential pressure MPa…
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